Microtechnology/Overviews
< MicrotechnologyInternet Resources
- This wikibook links extensively to wikipedia, but also to many valuable external resources.
See also
Books
Books about microfabrication
- "Fundamentals of Microfabrication" (2nd ed, 2002) by M. Madou - highly recommended!
- "Introduction to Microfabrication" (2004) by S. Franssila
Journals
Overview of the microtechnology related journals and their impact factors (Aug. 2006 values)
| Journal | link | Impact Factor | Comments |
|---|---|---|---|
| American Journal of Physics (AJP) | 0.82 | ? | |
| IEEE Transactions of Electron Devices | ? | IEEE | |
| Electronics Letters | 1.0 | ? | |
| Journal of Applied Physics | 2.5 | ? | |
| Journal of Materials Processing Technology | 0.6 | ? | |
| Journal of Microelectromechanical Systems (J.MEMS) | 3 | ? | |
| Journal Of Microlithography Microfabrication And Microsystems | 1.4 | ? | |
| Journal of Micromechanics and Microengineering | 2.5 | ? | |
| Journal of Microsystem Technologies | 0.72 | microsystem technologies-micro-and nanosystems-information storage and processing systems | |
| Journal of Solid-state electronics | 1.2 | ? | |
| Journal of Vacuum Science and Technology A (JVSTA) | 1.4 | Vacuum, Surfaces, Films | |
| Journal of Vacuum Science and Technology B (JVSTB) | 1.6 | Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena | |
| Lab on a Chip | 5.3 | ? | |
| Microelectronic Engineering | 1.4 | ? | |
| Microelectronics Journal | 0.35 | ? | |
| Sensor Letters | 1.1 | ? | |
| Sensors and Actuators A: Physical | 1.4 | ? | |
| Sensors and Actuators B: Chemical | 2.6 | ? | |
| Surface and Coatings Technology | 1.6 | ? |
Software
Layout Editor
MEMS Simulation
Optical Simulations
Microfabrication Products & Companies
Where to buy raw materials, wafers etc, and where to get the fabrication done is you cannot readily access cleanroom facilities.
Foundry services
- Danchip- cleanroom access for both industry and universities
- Freescale
- Honeywell MEMS Foundry Services
- X-fab
- Micrel's Wafer Fab Division
- ISSYS
- Micralyne MEMS Foundry
Suppliers of materials for microfabrication
Wafers
Silicon on insulator (SOI) wafers
- University wafers ; USA; Chris Baker [@universitywafer.com]; All kinds of wafers, possibility of small quantities
- Icemostech ; UK; Robin Wilson [RobinWilson@Icemostech.com]; Device layer +/- 0.5 µm
- Soitec ; France; Sabrina Grosdidier [sabrina.grosdidier@soitec.fr]; High quality SOI, device layer +/- 5 nm
- MEMC USA Marco Maffe [mmaffe@memc.it]; Device layer +/- 0.5 µm
- Ultrasil ; USA; Thomas J. Gentemann [ultrasiltg@aol.com]; Device layer +/- 0,5 µm, next day shipment of wafers from online inventory
- Okmetic Oyj ; Finland; Veli-Pekka Virtanen [veli-pekka.virtanen@okmetic.com]; Device layer +/- 0.5 µm
- IBIS ; USA; High quality SOI; Device layer +/- 5 nm
Microtechnology Products
A Microtechnology Timeline
- The first transistor
- The first microchip
- The first microprocessor
- 1965 Moores Law
- The roadmap
- The first PCR lab-on-a-chip system
- The first point-of-care lab on a chip system
References
See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.
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